A vibrating beam MEMS accelerometer for gravity and seismic measurements

Arif Mustafazade(University of Cambridge), Ashwin A. Seshia(University of Cambridge), Xudong Zou(Chinese Academy of Sciences), Guillermo Sobreviela(University of Cambridge), Philipp Steinmann, Milind Pandit(University of Cambridge), Chun Zhao(University of York), Zhijun Du, Roger T. Howe(Knexus Research (United States))
Scientific Reports
June 26, 2020
Cited by 310


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