Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe

Liang Yu(Harbin Institute of Technology), Tao Jing(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Xionglei Lin(Harbin Institute of Technology), Xingyang Feng(Harbin Institute of Technology)
Micromachines
December 10, 2023
Cited by 13


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