Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer
Fangzheng Li(Huazhong University of Science and Technology), Liangcheng Tu(Southern Marine Science and Engineering Guangdong Laboratory (Guangzhou)), Chun Zhao(University of York), Lujia Yang(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Dandan Liu(State Key Laboratory of Industrial Control Technology), Wenjie Wu(Tongji Hospital), Bingyang Cai(Huazhong University of Science and Technology), Le Gao(Shandong University)
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