Metal-Free High-Overtone Bulk Acoustic Resonators With Outstanding Acoustic Match and Thermal Stability

Jingjie Cheng(Shanghai Jiao Tong University), Lei Shao(Shanghai Jiao Tong University), Zhaoliang Peng(Shanghai Jiao Tong University), Wenming Zhang(Ministry of Education)
IEEE Electron Device Letters
September 19, 2023
Cited by 9


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