Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation
Jingqian Xi(Huazhong University of Science and Technology), Chun Zhao(University of York), Michaël Kraft(KU Leuven), Xudong Zou(Chinese Academy of Sciences), Xingyin Xiong(Chinese Academy of Sciences), Fangjing Hu(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Lei Xu(Huazhong University of Science and Technology), Chen Wang(Zhejiang A & F University), Chengxin Li(Huazhong University of Science and Technology), Huafeng Liu(East China Normal University)
Cited by 16
Related Papers
A vibrating beam MEMS accelerometer for gravity and seismic measurements
|Scientific Reports|2020|310
A review on coupled MEMS resonators for sensing applications utilizing mode localization
|Sensors and Actuators A Physical|2016|262
Raman scattering study of molecules adsorbed on ZnS nanocrystals
|Journal of Raman Spectroscopy|2006|220
An Ultrafast WSe<sub>2</sub> Photodiode Based on a Lateral <i>p-i-n</i> Homojunction
|ACS Nano|2021|160
Results of the Imager for Mars Pathfinder windsock experiment
|Journal of Geophysical Research Atmospheres|2000|117