Evaluation of Residual Stress in MEMS Micromirror Die Surface Mounting Process and Shock Destructive Reliability Test

Xiao-Yong Fang(Hunan Institute of Technology), Wenming Zhang(Ministry of Education), Jiahao Wu(Huawei Technologies (China)), Chuncheng Liu(University of California San Diego), Xiu‐Yuan Li(Ministry of Education of the People's Republic of China), Kai‐Ming Hu(Zhengzhou University)
IEEE Sensors Journal
June 12, 2023
Cited by 14


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