Frequency unlocking-based MEMS bifurcation sensors

Yan Qiao(Anhui University), Wenming Zhang(Ministry of Education), Xueyong Wei(First Affiliated Hospital of Xi'an Jiaotong University), Ronghua Huan(Zhejiang University), Yutao Xu(Guizhou Electric Power Design and Research Institute), Eihab Abdel‐Rahman(University of Waterloo), Alaaeldin Elhady(University of Waterloo), Zhan Shi(Westlake University)
Microsystems & Nanoengineering
May 16, 2023
Cited by 26


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