Environmental data and facts in the semiconductor manufacturing industry: An unexpected high water and energy consumption situation
Qi Wang(China Jiliang University), Yunpeng Wu(University Town of Shenzhen), Han-Ying Cai(University Town of Shenzhen), Nan Huang(Guangxi University), Zhuo Chen(State Key Joint Laboratory of Environment Simulation and Pollution Control), Xiaowen Chen(State Key Joint Laboratory of Environment Simulation and Pollution Control)
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