Atomic-scale surface of fused silica induced by chemical mechanical polishing with controlled size spherical ceria abrasives

Guanghong Xu(Dalian University of Technology), Wei Wen(Beijing Technology and Business University), Zhenyu Zhang(China University of Petroleum, East China), Lu Liu(Dalian University of Technology), Dongdong Liu(Shanghai University), Jianmei Wang(Taiyuan University of Science and Technology), Fanning Meng(Dalian University of Technology), Xiangxiang Cui(Bengbu Medical College), Chunjing Shi(Hangzhou Dianzi University)
Journal of Manufacturing Processes
December 15, 2022
Cited by 93


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