Equivalent Measurement and Real-Time Compensation of Error Caused by Intensity Change in Deep Sub-Nanometer Displacement Measuring Interferometry

Jianing Wang(Beijing Institute of Technology), Jiubin Tan(Harbin Institute of Technology), Di Chang(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Yunke Sun(Harbin Institute of Technology), Xing Xu(Tongji University)
Photonics
September 30, 2022
10.3390/photonics9100714
Cited by 7

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