A Scale Factor Enhancement Method Based On Parametric Modulation For A Resonant MEMS Accelerometer

Jingqian Xi(Huazhong University of Science and Technology), Xudong Zou(Chinese Academy of Sciences), Kunfeng Wang(Chinese Academy of Sciences), Xingyin Xiong(Chinese Academy of Sciences), Fangzheng Li(Huazhong University of Science and Technology), Lu Gao(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Lei Xu(Huazhong University of Science and Technology), Chengxin Li(Huazhong University of Science and Technology), Chun Zhao(University of York)
2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
April 24, 2022
Cited by 3


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