A Closed-Loop System for Resonant MEMS Sensors Subject to Blue-Sideband Excitation

Lei Xu(Huazhong University of Science and Technology), Chun Zhao(University of York), Kunfeng Wang(Chinese Academy of Sciences), Xingyin Xiong(Chinese Academy of Sciences), Jianyuan Pi(Huazhong University of Science and Technology), Lu Gao(Chinese Academy of Sciences), Fangzheng Li(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Chengxin Li(Huazhong University of Science and Technology), Jingqian Xi(Huazhong University of Science and Technology), Huafeng Liu(East China Normal University), Xudong Zou(Chinese Academy of Sciences)
Journal of Microelectromechanical Systems
June 22, 2022
Cited by 22


Related Papers