A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

S. S. Teja Nibhanupudi(The University of Texas at Austin), Jaydeep P. Kulkarni(The University of Texas at Austin), Anshul Gupta(IMEC), A. Spessot(IMEC), Shidhartha Das(American Rock Mechanics Association), Divya Prasad(American Rock Mechanics Association), Geert Hellings(IMEC), Peter Debacker(IMEC), Julien Ryckaert(IMEC), Diederik Verkest(IMEC), Brian Cline(American Rock Mechanics Association), Alex Robinson(American Rock Mechanics Association), James Myers(American Rock Mechanics Association), Odysseas Zografos(IMEC)
IEEE Transactions on Electron Devices
July 7, 2022
Cited by 20


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