Terahertz micromachined on-wafer probes: Repeatability and robustness
L. Chen(University of Virginia), N. Scott Barker(University of Virginia), Christopher Groppil(Arizona State University), Theodore Reck(Virginia Diodes (United States)), Alexander Arsenovic(University of Virginia), Robert M. Weikle(Microprobes (United States)), C. Zhang(University of Virginia), Arthur W. Lichtenberger(University of Virginia)
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