A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors

Chun Zhao(University of York), Ashwin A. Seshia(University of Cambridge), Xudong Zou(Chinese Academy of Sciences), Guillermo Sobreviela(University of Cambridge), Milind Pandit(University of Cambridge), Boqian Sun(Tsinghua University)
Journal of Microelectromechanical Systems
April 17, 2017
Cited by 40


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