A MEMS Resonant Lorentz-Force Magnetometer with Both Structural Topology Optimization and Parametric Pumping for Q-Factor Enhancement
Xiaoxiao Song(Huazhong University of Science and Technology), Michaël Kraft(KU Leuven), Shuangyang Kuang(Huazhong University of Science and Technology), Liangcheng Tu(Southern Marine Science and Engineering Guangdong Laboratory (Guangzhou)), Lu Gao(Chinese Academy of Sciences), Fangzheng Li(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Chen Wang(Zhejiang A & F University), Huafeng Liu(East China Normal University), Jingqian Xi(Huazhong University of Science and Technology), X. Lei(Huazhong University of Science and Technology), Chun Zhao(University of York)
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
January 9, 2022
Cited by 4
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