A Low-Noise Frequency Readout System For Blue-Sideband Excited Resonant Mems Sensors

Lei Xu(Huazhong University of Science and Technology), Chun Zhao(University of York), Jianyuan Pi(Huazhong University of Science and Technology), Lu Gao(Chinese Academy of Sciences), Fangzheng Li(Huazhong University of Science and Technology), Chengxin Li(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Huafeng Liu(East China Normal University), Jingqian Xi(Huazhong University of Science and Technology)
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
January 9, 2022
Cited by 3


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