Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR

Xiao-Yong Fang(Hunan Institute of Technology), Wenming Zhang(Ministry of Education), Ge Yan(Shanghai Jiao Tong University), Zhiyuan Wu(Shanghai Jiao Tong University), Jiahao Wu(Huawei Technologies (China)), Kai‐Ming Hu(Zhengzhou University)
Journal of Microelectromechanical Systems
December 2, 2021
Cited by 19


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