Modal characteristics of coupled MEMS resonator array under the effect of residual stress

Bo Peng(Shanghai Jiao Tong University), Wenming Zhang(Ministry of Education), Xiao-Yong Fang(Hunan Institute of Technology), Xiu‐Yuan Li(Ministry of Education of the People's Republic of China), Kai‐Ming Hu(Zhengzhou University)
Sensors and Actuators A Physical
November 24, 2021
Cited by 21


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