Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Xiao-Yong Fang(Hunan Institute of Technology), Wenming Zhang(Ministry of Education), Ge Yan(Shanghai Jiao Tong University), Jiahao Wu(Huawei Technologies (China)), Xiu‐Yuan Li(Ministry of Education of the People's Republic of China), Kai‐Ming Hu(Zhengzhou University)
IEEE Journal of Selected Topics in Quantum Electronics
November 2, 2021
Cited by 22


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