CO2Gas Sensing By Cmos-Mems Scaln-Based Pyroelectric Detector Based on MID-IR Absorption

Doris K. T. Ng(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), Li-Yan Siow(Agency for Science, Technology and Research), Yuan Hsing Fu(Agency for Science, Technology and Research), Yuan Gao(University of Jinan), Norhanani Jaafar(Agency for Science, Technology and Research), Chong-Pei Ha(Agency for Science, Technology and Research), Weiguo Chen(Agency for Science, Technology and Research), Qingxin Zhang(Simon Fraser University), Tan‐Tan Zhang(Agency for Science, Technology and Research), Linfang Xu(Agency for Science, Technology and Research), Eldwin J. Ng(Agency for Science, Technology and Research)
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