On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation

Chengxin Li(Huazhong University of Science and Technology), Liangcheng Tu(Southern Marine Science and Engineering Guangdong Laboratory (Guangzhou)), Fangzheng Li(Huazhong University of Science and Technology), Lu Gao(Huazhong University of Science and Technology), Yuan Wang(Huazhong University of Science and Technology), Jingqian Xi(Huazhong University of Science and Technology), Huafeng Liu(East China Normal University), Chun Zhao(University of York)
Journal of Microelectromechanical Systems
May 24, 2021
Cited by 23


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