Improved Specific Detectivity to 10<sup>7</sup> for CMOS-MEMS Pyroelectric Detector Based on 12%-Doped Scandium Aluminum Nitride
Doris K. T. Ng(Agency for Science, Technology and Research), Navab Singh(Agency for Science, Technology and Research), Li-Yan Siow(Agency for Science, Technology and Research), Chong Pei Ho(Agency for Science, Technology and Research), Lennon Y. T. Lee(Agency for Science, Technology and Research), Qingxin Zhang(Shaanxi Normal University), Tan‐Tan Zhang(Agency for Science, Technology and Research), Linfang Xu(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics)
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