A Low-Noise High-Order Mode-Localized MEMS Accelerometer

Hemin Zhang(University of Cambridge), Ashwin A. Seshia(University of Cambridge), Jiangkun Sun(National University of Defense Technology), Chun Zhao(University of York), Milind Pandit(University of Cambridge), Dongyang Chen(University of Cambridge), Madan Parajuli(University of Cambridge), Guillermo Sobreviela(University of Cambridge)
Journal of Microelectromechanical Systems
February 16, 2021
Cited by 29


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