Synergistic effect of LABSA/JFCE combined surfactant system on the removal of particles on copper wafer surface

Da Yin(Tianjin University of Technology), Baimei Tan(Tianjin University of Technology), Nannan Zhang(Tianjin University of Technology), Mengrui Liu(Columbia University Irving Medical Center), Qi Wang(Tianjin University of Technology), Siyu Tian(Central South University), Shihao Zhang(Tianjin University of Technology), Xiaoqin Sun(Tianjin University of Technology)
Materials Chemistry and Physics
September 18, 2020
Cited by 29


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