An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
Xiaoxiao Song(Huazhong University of Science and Technology), Liangcheng Tu(Southern Marine Science and Engineering Guangdong Laboratory (Guangzhou)), Chun Zhao(University of York), Qiu Wang(Huazhong University of Science and Technology), Huafeng Liu(East China Normal University), Yanyan Fang(Harvard University), Ziqiang Qu(Soochow University)
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