Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection
Da Yin(Tianjin University of Technology), Mengrui Liu(Columbia University), Baimei Tan(Tianjin University of Technology), Yang Liu(Yangtze University), Yi Xu(Hebei University of Technology), Xiaoqin Sun(Tianjin University of Technology), Fan Yang(Yunnan Normal University), Tengda Ma(Hebei University of Technology)
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