Synergistic effect of composite complex agent on BTA removal in post CMP cleaning of copper interconnection

Da Yin(Tianjin University of Technology), Mengrui Liu(Columbia University Irving Medical Center), Baimei Tan(Tianjin University of Technology), Yang Liu(Tianjin University of Technology), Yi Xu(Hebei University of Technology), Xiaoqin Sun(Tianjin University of Technology), Fan Yang(Second Affiliated Hospital of Guangzhou Medical University), Tengda Ma(Hebei University of Technology)
Materials Chemistry and Physics
May 23, 2020
Cited by 47


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