A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization

Bo Peng(Shanghai Jiao Tong University), Wenming Zhang(Ministry of Education), Han Yan(Shanghai Jiao Tong University), Lei Li(Jiangsu Normal University), Kai‐Ming Hu(Zhengzhou University), Lei Shao(Shanghai Jiao Tong University), Xueyong Wei(First Affiliated Hospital of Xi'an Jiaotong University)
Journal of Microelectromechanical Systems
December 24, 2019
Cited by 61


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