Improving Thickness Uniformity of Mo/Si Multilayers on Curved Spherical Substrates by a Masking Technique
Zhe Zhang(Tongji University), Chun Xie(Tongji University), Qiushi Huang(Tongji University), Runze Qi(Tongji University), Zhong Zhang(Southeast University), Zhanshan Wang(Tongji University), Wenbin Li(Tongji University), Yingna Shi(Tongji University), Shengzhen Yi(Tongji University), Yiyun Yao(Tongji University)
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