An Ultra-High Resolution Resonant MEMS Accelerometer

Milind Pandit(University of Cambridge), Ashwin A. Seshia(University of Cambridge), Arif Mustafazade(University of Cambridge), Chun Zhao(University of York), Philipp Steinmann, Guillermo Sobreviela(University of Cambridge), Xudong Zou(Chinese Academy of Sciences)
Unknown
January 1, 2019
Cited by 34


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