A High Resolution Differential Mode-Localized MEMS Accelerometer

Milind Pandit(University of Cambridge), Ashwin A. Seshia(University of Cambridge), Chun Zhao(University of York), Xudong Zou(Chinese Academy of Sciences), Guillermo Sobreviela(University of Cambridge)
Journal of Microelectromechanical Systems
August 13, 2019
Cited by 55


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