Zoom into picometer: a picoscale equivalent phase-difference-generating method for testing heterodyne interferometers without ultraprecision stages

Di Chang(Harbin Institute of Technology), Jiubin Tan(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Jianing Wang(Harbin Institute of Technology)
Optical Engineering
June 5, 2019
Cited by 8


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