Dose-Modulated Maskless Lithography for the Efficient Fabrication of Compound Eyes With Enlarged Field-of-View

Jianghui Liu(Chinese Academy of Sciences), Song Hu(Shanghai Jiao Tong University), Junbo Liu(Chinese Academy of Sciences), Xi Liu(Georgia Institute of Technology), Qingyuan Deng(Huazhong University of Science and Technology), Yu He(Chinese Academy of Sciences), Yan Tang(Central South University)
IEEE photonics journal
April 25, 2019
Cited by 27


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