A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz<sup>1/2</sup> Noise Floor

Chun Zhao(University of York), Ashwin A. Seshia(University of Cambridge), Arif Mustafazade(University of Cambridge), Philipp Steinmann, Milind Pandit(University of Cambridge), Guillermo Sobreviela(University of Cambridge), Xudong Zou(Chinese Academy of Sciences)
Journal of Microelectromechanical Systems
April 16, 2019
Cited by 81


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