A real-time nonlinear error measurement method with picometer accuracy and free from target motion state

Haijin Fu(Harbin Institute of Technology), Jiubin Tan(Harbin Institute of Technology), Ruidong Ji(Harbin Institute of Technology), Yue Wang(Harbin Institute of Technology), Hongxing Yang(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Ruitao Yang(Yulin Normal University)
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
March 7, 2019
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