Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance

Di Chang(Harbin Institute of Technology), Jiubin Tan(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Jianing Wang(Beijing Institute of Technology), Xing Xu(Tongji University)
Applied Sciences
January 13, 2019
10.3390/app9020263
Cited by 28

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