On the noise optimization of resonant MEMS sensors utilizing vibration mode localization

Chun Zhao(University of York), Ashwin A. Seshia(University of Cambridge), Xudong Zou(Chinese Academy of Sciences), Guillermo Sobreviela(University of Cambridge), Milind Pandit(University of Cambridge), Arif Mustafazade(University of Cambridge), Sijun Du(Delft University of Technology)
Applied Physics Letters
May 7, 2018
Cited by 39


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