Evaluation of LPCVD SiN_{<italic>x</italic>} Gate Dielectric Reliability by TDDB Measurement in Si-Substrate-Based AlGaN/GaN MIS-HEMT

Abstract

Si-substrate-based AlGaN/GaN high-electron mobility power transistors with low pressure chemical vapor deposition (LPCVD) SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><i>x</i></sub> as gate isolation material are fabricated on a 6-in wafer by CMOS compatible process. The dielectric failure by forward-biased constant-voltage stress time-dependent dielectric breakdown (TDDB) measurements at various temperatures (from room temperature to 250 °C) and their statistical Weibull analysis are compared. Impact of gate dielectric area and multifinger on the SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><i>x</i></sub> TDDB characteristics is also discussed. Using thermal microscope imager, the leakage current spots have been identified. The mean time to failure decreases with the increasing finger numbers in exponential form. We also predict the device ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${W}_{G}= {0.25}$ </tex-math></inline-formula> mm) with 35-nm-thick LPCVD SiN <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><i>x</i></sub> gate dielectric can survive at a positive gate voltage of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{\text {GS}}= {15}$ </tex-math></inline-formula> V for a 10-year time-to-breakdown lifetime (100 ppm and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${T}= {25}$ </tex-math></inline-formula> °C) and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{\text {GS}}= {7.5}$ </tex-math></inline-formula> V for a 10-year time-to-breakdown lifetime (100 ppm and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${T}= {250}$ </tex-math></inline-formula> °C).