Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Xin Zhou(National University of Defense Technology), Ashwin A. Seshia(University of Cambridge), Dingbang Xiao(National University of Defense Technology), Qingsong Li(Dalian Ocean University), Zhihua Chen(Hunan University), Xuezhong Wu(National University of Defense Technology), Qian Hu(National University of Defense Technology), Yulie Wu(National University of Defense Technology), Chun Zhao(University of York), Kaixuan He(Fudan University), Zhanqiang Hou(National University of Defense Technology)
Micromachines
January 22, 2018
Cited by 16


Related Papers