Fast preparation of (111)‐oriented β‐SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane without H <sub>2</sub>

Qingfang Xu(Wuhan University of Technology), Hitoshi Ohmori, Shusen Li, Rong Tu(Wuhan University of Technology), Haiwen Li(Sun Yat-sen University), Song Zhang(Nanjing University), Peipei Zhu(Wuhan University of Technology), Lianmeng Zhang(Wuhan University of Technology), Takashi Goto(Yokohama National University), Qingyun Sun(Wuhan University of Technology), Mingxu Han(Tohoku University), Ji Shi(Quality Enhancement Research Initiative), Qizhong Li(Wuhan University of Technology), Meijun Yang(Wuhan University of Technology), Jiasheng Yan(The Ohio State University)
Journal of the American Ceramic Society
October 30, 2017
Cited by 16


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