徐冷パターンを有する電子ビーム融解によるmc‐SiにおけるSiC堆積作用と炭素移動【Powered by NICT】

Qin Shi-qiang, Yiqiu Tan(Dalian University of Technology), Jiang Da-chuan, Shi Shuang, Pengting Li(Dalian University of Technology), An Guangye, Guo Xiaoliang(Cell Technology (China))
Materials Science in Semiconductor Processing
January 1, 2016
Cited by 0


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