Study on the removal process of phosphorus from silicon by electron beam melting

Yi Tan(Dalian University of Technology), Dachuan Jiang(Dalian University of Technology), Wei Dong(Dalian University of Technology), Guo Xiaoliang(Cell Technology (China)), Shuang Shi(Dalian University of Technology)
Vacuum
January 16, 2013
Cited by 56


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