Surface textured silicon single-photon avalanche diode
Kai Zang(Stanford University), Xun Ding(Hefei National Center for Physical Sciences at Nanoscale), Xiao Jiang(Hefei National Center for Physical Sciences at Nanoscale), Yijie Huo(Stanford University), Matthew Morea(Stanford University), Xiaochi Chen(Stanford University), Ching-Ying Lu(Stanford University), Muyu Xue(Stanford University), Yusi Chen(Stanford University), Colleen Shang(Stanford University), T. I. Kamins(Stanford University), Qiang Zhang(Hefei National Center for Physical Sciences at Nanoscale), Jian-Wei Pan(Hefei National Center for Physical Sciences at Nanoscale), James S. Harris(Stanford University)
Cited by 5
Abstract
We present a surface textured Si SPAD with improved detection efficiency and without sacrificing dark count rate or jitter distribution. Texturing reduces reflection, allows weak light trapping and is CMOS and lithography compatible.
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