Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation

Han Yan(Shanghai Jiao Tong University), Kai‐Ming Hu(Zhengzhou University), Wenming Zhang(Ministry of Education), Huiming Jiang(Shanghai Jiao Tong University)
Sensors
January 8, 2017
Cited by 9


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