Fabrication of 160-nm T-gate metamorphic AlInAs/GaInAs HEMTs on GaAs substrates by metal organic chemical vapour deposition

Haiou Li(Hong Kong University of Science and Technology), Lau Kei May, Wei Huang(China Institute of Water Resources and Hydropower Research), Chak Wah Tang(Hong Kong University of Science and Technology), Xiao‐Fang Deng(Guilin University of Technology)
Acta Physica Sinica
January 1, 2011
Cited by 3


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