A Comparative Study of Output Metrics for an MEMS Resonant Sensor Consisting of Three Weakly Coupled Resonators

Chun Zhao(University of York), Michaël Kraft(KU Leuven), Jianbing Xie(Northwestern Polytechnical University), Graham S. Wood(University of Southampton), Honglong Chang(Northwestern Polytechnical University), Suan Hui Pu(University of Southampton Malaysia)
Journal of Microelectromechanical Systems
June 28, 2016
Cited by 43


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