High-speed high-resolution heterodyne interferometer using a laser with low beat frequency
Xiaofei Diao(National Institute of Metrology), Yanhui Kang(National Institute of Metrology), Pengcheng Hu(Harbin Institute of Technology), Zi Xue(National Institute of Metrology)
Cited by 25
Related Papers
Displacement measuring grating interferometer: a review
|Frontiers of Information Technology & Electronic Engineering|2019|162
Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy
|Photonics Research|2024|72
Experimental Array for Generating Dual Circularly-Polarized Dual-Mode OAM Radio Beams
|Scientific Reports|2017|66
High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer
|Photonics Research|2024|63
The first determination of the Planck constant with the joule balance NIM-2
|Metrologia|2017|55