SiC sedimentation and carbon migration in mc-Si by election beam melting with slow cooling pattern

Shiqiang Qin(Dalian University of Technology), Yi Tan(Dalian University of Technology), Pengting Li(Dalian University of Technology), Dachuan Jiang(Dalian University of Technology), Guo Xiaoliang(Cell Technology (China)), Shuang Shi(Dalian University of Technology), Guangye An(Dalian University of Technology)
Materials Science in Semiconductor Processing
June 9, 2016
10.1016/j.mssp.2016.06.002
Cited by 6

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