Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Graham S. Wood(University of Southampton), Michaël Kraft(KU Leuven), Chun Zhao(University of York), Stuart A. Boden(University of Southampton), Suan Hui Pu(University of Southampton Malaysia), Ibrahim Sari(University of Southampton)
Microelectronic Engineering
March 25, 2016
Cited by 30


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