Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process
Graham S. Wood(University of Southampton), Michaël Kraft(KU Leuven), Chun Zhao(University of York), Stuart A. Boden(University of Southampton), Suan Hui Pu(University of Southampton Malaysia), Ibrahim Sari(University of Southampton)
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