A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity

Chun Zhao(University of York), Michaël Kraft(KU Leuven), Jianbing Xie(Northwestern Polytechnical University), Graham S. Wood(University of Southampton), Honglong Chang(Northwestern Polytechnical University), Suan Hui Pu(University of Southampton Malaysia)
Journal of Microelectromechanical Systems
October 28, 2015
Cited by 90


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